Simulation of SAW Sensors with Various Distributed Mass Loadings Using Two-Dimensional Coupling-of-Modes Theory

Ran You; Jiuling Liu; Minghua Liu; Zhiyuan Chen; Shitang He

doi:10.3390/s20247260

Simulation of SAW Sensors with Various Distributed Mass Loadings Using Two-Dimensional Coupling-of-Modes Theory

Sensors (Basel). 2020 Dec 18;20(24):7260. doi: 10.3390/s20247260.

Authors

Ran You^{1

2}, Jiuling Liu¹, Minghua Liu¹, Zhiyuan Chen^{1

2}, Shitang He¹

Affiliations

¹ Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.
² School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

Abstract

In order to accurately investigate the disturbance of complex distributed mass loading on surface acoustic wave (SAW) propagation characteristics, two-dimensional coupling-of-modes (2-D COM) theory and finite element method (FEM) were used to simulate the responses of SAW sensors. By using the PDE mode of FEM software, four SAW resonators with the loads in different distribution patterns were modeled. Also, we fabricated and measured a series of SAW resonators accordingly. The results showed that the 2-D COM theory combined with the finite element method was able to simulate the transverse modes of the device and the disturbance of the mass loading on the transverse mode effectively, making the simulation more accurate.

Keywords: 2-D COM theory; SAW sensors; finite element method (FEM); non-uniform load; transverse modes.

Publication types

Letter

Grants and funding

No. 12074404/National Natural Science Foundation of China