This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator with comb fingers in a MEMS resonant accelerometer is established. Then, the nonlinear and nonlinear stiffness coefficients are calculated and analyzed with the Galérkin principle. The linear natural frequency, tracking error, and nonlinear frequency offset are obtained by multi-scale method. Finally, to further analyze the nonlinear vibration, a sample-based stochastic model is established, and the uncertainty analysis method is applied. It is concluded from the results that nonlinear vibration can be reduced by reducing the resonant beam length and increasing the resonant beam width and thickness. In addition, the resonant beam length and thickness have more significant effects, while the resonant beam width and the single concentrated mass of comb fingers have little effect, which are verified by experiments. The results of this research have proved that uncertainty analysis is an effective approach in nonlinear vibration analysis and instructional in practical resonant accelerometer design.
Keywords: MEMS resonant accelerometer; experimental verification; nonlinear vibration; sample-based stochastic model; uncertainty analysis.