Synthesis and Crystallization of Atomic Layer Deposition β-Eucryptite LiAlSiO4 Thin-Film Solid Electrolytes

Ryan Sheil; Ya-Chuan Perng; Julian Mars; Jea Cho; Bruce Dunn; Michael F Toney; Jane P Chang

doi:10.1021/acsami.0c11614

Synthesis and Crystallization of Atomic Layer Deposition β-Eucryptite LiAlSiO₄ Thin-Film Solid Electrolytes

ACS Appl Mater Interfaces. 2020 Dec 23;12(51):56935-56942. doi: 10.1021/acsami.0c11614. Epub 2020 Dec 14.

Authors

Ryan Sheil¹, Ya-Chuan Perng¹, Julian Mars², Jea Cho¹, Bruce Dunn³, Michael F Toney², Jane P Chang¹

Affiliations

¹ Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095, United States.
² SSRL Materials Science Division, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United States.
³ Department of Material Science and Engineering, University of California, Los Angeles, California 90095, United States.

PMID: 33314924
DOI: 10.1021/acsami.0c11614

Abstract

Atomic layer deposition (ALD) was used to control the stoichiometry of thin lithium aluminosilicate films, thereby enabling crystallization into the ion-conducting β-eucryptite LiAlSiO₄ phase. The rapid thermal annealed ALD film developed a well-defined epitaxial relationship to the silicon substrate: β-LiAlSiO₄ (12̅10)||Si (100) and β-LiAlSiO₄ (101̅0)||Si (001). The extrapolated room temperature ionic conductivity was found to be 1.2 × 10^-7 S/cm in the [12̅10] direction. Because of the unique 1-D channel along the c axis of β-LiAlSiO₄, the epitaxial thin film has the potential to facilitate ionic transport if oriented with the c axis normal to the electrode surface, making it a promising electrolyte material for three-dimensional lithium-ion microbatteries.

Keywords: 3D batteries; atomic layer deposition; crystalline solid electrolyte; epitaxial thin films; lithium-ion batteries; thin-film processing.