High-resolution integrated piezoresistive sensors for microfluidic monitoring

Lab Chip. 2021 Jan 7;21(1):83-92. doi: 10.1039/d0lc01046d. Epub 2020 Dec 10.

Abstract

Microfluidic devices are traditionally monitored by bulky and expensive off-chip sensors. We have developed a soft piezoresistive sensor capable of measuring micron-level strains that can be easily integrated into devices via soft lithography. We apply this sensor to achieve fast and localized monitoring of pressure, flow, and valve actuation.

Publication types

  • Research Support, N.I.H., Extramural
  • Research Support, Non-U.S. Gov't

MeSH terms

  • Lab-On-A-Chip Devices*
  • Microfluidics*