Characteristics of Sputtered Lead Zirconate Titanate Thin Films With Different Layer Configurations and Large Thickness

Kensuke Kanda; Tsukasa Koyama; Takeshi Yoshimura; Shinichi Murakami; Kazusuke Maenaka

doi:10.1109/TUFFC.2020.3039230

Characteristics of Sputtered Lead Zirconate Titanate Thin Films With Different Layer Configurations and Large Thickness

IEEE Trans Ultrason Ferroelectr Freq Control. 2021 May;68(5):1988-1993. doi: 10.1109/TUFFC.2020.3039230. Epub 2021 Apr 26.

Authors

Kensuke Kanda, Tsukasa Koyama, Takeshi Yoshimura, Shinichi Murakami, Kazusuke Maenaka

PMID: 33211656
DOI: 10.1109/TUFFC.2020.3039230

Abstract

To evaluate the characteristics of Pb(Zr,Ti)O₃ (PZT) thin films (about [Formula: see text] thick) with three different sputtering configurations-single-layer (SL) deposition, multilayer (ML) deposition with internal electrodes, and multistep (MS) deposition-were prepared. The SL films exhibited poorer dielectric characteristics than the ML and MS films. The reliability and piezoelectric characteristics were especially high in the MS film, with an [Formula: see text] constant of -9.5 C · m^-2. To investigate the porosity of the films, reconstructed 3-D SEM technique is employed. Reconstructed 3-D SEM images revealed decreased void densities in the ML and MS films, which improved their performance. The MS configuration provided the best dielectric and piezoelectric performance of PZT films.

Publication types

Research Support, Non-U.S. Gov't