Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV)

Youjung Kim; Sanghyun Jin; Kimoon Park; Jinhyun Lee; Jae-Hong Lim; Bongyoung Yoo

doi:10.3389/fchem.2020.00771

Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV)

Front Chem. 2020 Oct 14:8:771. doi: 10.3389/fchem.2020.00771. eCollection 2020.

Authors

Youjung Kim¹, Sanghyun Jin², Kimoon Park³, Jinhyun Lee¹, Jae-Hong Lim⁴, Bongyoung Yoo^{1

2

3}

Affiliations

¹ Department of Materials Science and Chemical Engineering, Hanyang University, Ansan, South Korea.
² Department of Material Engineering, Hanyang University, Ansan, South Korea.
³ Department of Advanced Material Science Engineering, Hanyang University, Ansan, South Korea.
⁴ Department of Materials Science and Engineering, Gachon University, Seongnam-Si, South Korea.

Abstract

Thermal stress induced by annealing the Cu filling of through-silicon vias (TSVs) requires further investigation as it can inhibit the performance of semiconductor devices. This study reports the filling behavior of TSVs prepared using direct current and pulse current Cu electrodeposition with and without pre-annealing. The thermal extrusion of Cu inside the TSVs was studied by observing the extrusion behavior after annealing and the changes in grain orientation using scanning electron microscopy and electron backscatter diffraction. The bottom-up filling ratio achieved by the direct current approach decreased because the current was used both to fill the TSV and to grow bump defects on the top surface of the wafer. In contrast, pulse current electrodeposition yielded an improved TSV bottom-up filling ratio and no bump defects, which is attributable to strong suppression and thin diffusion layer. Moreover, Cu deposited with a pulse current exhibited lesser thermal extrusion, which was attributed to the formation of nanotwins and a change in the grain orientation from random to (101). Based on the results, thermal extrusion of the total area of the TSVs could be obtained by pulse current electrodeposition with pre-annealing.

Keywords: pre-annealing; pulse current; seed layer; thermal extrusion; through-silicon-via (TSV).