New pathways towards molecular chlorohydrooligosilanes enable their one-pot synthesis in preparative amounts either by the selective chlorination of the corresponding perhydrosilanes with HCl/AlCl3 or by the partial hydrogenation of perchlorooligosilanes with substoichiometric amounts of iBu2AlH. The unexpected selective formation of Cl3Si-substituted species in the partial hydrogenation reactions could be related to mechanistic aspects.