Facile production of ultra-fine silicon nanoparticles

R Soc Open Sci. 2020 Sep 16;7(9):200736. doi: 10.1098/rsos.200736. eCollection 2020 Sep.

Abstract

A facile procedure for the synthesis of ultra-fine silicon nanoparticles without the need for a Schlenk vacuum line is presented. The process consists of the production of a (HSiO1.5) n sol-gel precursor based on the polycondensation of low-cost trichlorosilane (HSiCl3), followed by its annealing and etching. The obtained materials were thoroughly characterized after each preparation step by electron microscopy, Fourier transform and Raman spectroscopy, X-ray dispersion spectroscopy, diffraction methods and photoluminescence spectroscopy. The data confirm the formation of ultra-fine silicon nanoparticles with controllable average diameters between 1 and 5 nm depending on the etching time.

Keywords: Si nanoparticle; synthesis; trichlorosilane; ultra-fine silicon.

Associated data

  • figshare/10.6084/m9.figshare.c.5112737