Surface-plasmon-coupled optical force sensors based on metal-insulator-metal metamaterials with movable air gap

Sci Rep. 2020 Sep 9;10(1):14807. doi: 10.1038/s41598-020-71825-x.

Abstract

We proposed surface-plasmon-coupled optical force sensors based on metal-insulator-metal (MIM) metamaterials with a movable air gap as an insulator layer. The MIM metamaterial was composed of an air gap sandwiched by a metal nanodot array and a metal diaphragm, the resonant wavelength of which was red-shifted when the air gap was narrowed by applying a normal force. We designed and fabricated a prototype of the proposed sensor and confirmed that the MIM metamaterial could be used as a force sensor with larger sensitivity than a force sensor based on Fabry-Pérot interferometer (FPI).