The evaluation of surface topography changes in nanoscaled 2,6-diphenyl anthracene thin films by atomic force microscopy

Ştefan Ţălu; Shahram Solaymani; Sahar Rezaee; Negin B Nezafat

doi:10.1002/jemt.23569

The evaluation of surface topography changes in nanoscaled 2,6-diphenyl anthracene thin films by atomic force microscopy

Microsc Res Tech. 2021 Jan;84(1):89-100. doi: 10.1002/jemt.23569. Epub 2020 Aug 28.

Authors

Ştefan Ţălu¹, Shahram Solaymani², Sahar Rezaee², Negin B Nezafat³

Affiliations

¹ Technical University of Cluj-Napoca, The Directorate of Research, Development and Innovation Management (DMCDI), Cluj-Napoca, Romania.
² Department of Physics, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran.
³ School of Physics, Institute for Research in Fundamental Sciences (IPM), Tehran, Iran.

PMID: 32860319
DOI: 10.1002/jemt.23569

Abstract

The physical properties of electronic devices made by 2,6-diphenyl anthracene (DPA) are influenced by the microtexture of DPA surfaces. This work focused on the experimental investigation of the 3-D surface microtexture of DPA thin films deposited on OTS (octadecyltrichlorosilane), HMDS (Hexamethyldisilasane), OTMS (octadecyltrimethoxysilane), and Si/SiO₂ (300 nm SiO₂ thickness) substrates with 5 and 50 nm thicknesses and 5 and 10 μm scan size. The thin film surfaces were recorded using atomic force microscopy (AFM) and their images were stereometrically analyzed to obtain statistical parameters, in accordance with ASME B46.1-2009 and ISO 25178-2: 2012. The results showed the effect of different manufacturing parameters on microtexture values where the granular structure is confirmed in all films. In addition, root mean square is increased by increasing the thickness from 5 to 50 nm for all types of substrates.

Keywords: 2,6-diphenyl anthracene (DPA); atomic force microscopy; statistical parameters; stereometric analysis; surface microtexture; thin film field-effect transistors.