Wafer-Scale Highly Oriented Monolayer MoS2 with Large Domain Sizes

Qinqin Wang; Na Li; Jian Tang; Jianqi Zhu; Qinghua Zhang; Qi Jia; Ying Lu; Zheng Wei; Hua Yu; Yanchong Zhao; Yutuo Guo; Lin Gu; Gang Sun; Wei Yang; Rong Yang; Dongxia Shi; Guangyu Zhang

doi:10.1021/acs.nanolett.0c02531

Wafer-Scale Highly Oriented Monolayer MoS₂ with Large Domain Sizes

Nano Lett. 2020 Oct 14;20(10):7193-7199. doi: 10.1021/acs.nanolett.0c02531. Epub 2020 Sep 1.

Authors

Qinqin Wang^{1

2}, Na Li^{1

2}, Jian Tang^{1

2}, Jianqi Zhu^{1

2}, Qinghua Zhang^{1

2}, Qi Jia^{1

2}, Ying Lu^{1

2}, Zheng Wei^{1

2}, Hua Yu^{1

2}, Yanchong Zhao^{1

2}, Yutuo Guo^{1

2}, Lin Gu^{1

2}, Gang Sun^{1

2}, Wei Yang^{1

2

3}, Rong Yang^{1

3

4}, Dongxia Shi^{1

2

3}, Guangyu Zhang^{1

2

3

4}

Affiliations

¹ Beijing National Laboratory for Condensed Matter Physics, Key Laboratory for Nanoscale Physics and Devices, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.
² School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100190, China.
³ Beijing Key Laboratory for Nanomaterials and Nanodevices, Beijing 100190, China.
⁴ Songshan Lake Materials Laboratory, Dongguan, Guangdong 523808, China.

PMID: 32833463
DOI: 10.1021/acs.nanolett.0c02531

Abstract

Two-dimensional molybdenum disulfide (MoS₂) is an emergent semiconductor with great potential in next-generation scaled-up electronics, but the production of high-quality monolayer MoS₂ wafers still remains a challenge. Here, we report an epitaxy route toward 4 in. monolayer MoS₂ wafers with highly oriented and large domains on sapphire. Benefiting from a multisource design for our chemical vapor deposition setup and the optimization of the growth process, we successfully realized material uniformity across the entire 4 in. wafer and greater than 100 μm domain size on average. These monolayers exhibit the best electronic quality ever reported, as evidenced from our spectroscopic and transport characterizations. Our work moves a step closer to practical applications of monolayer MoS₂.

Keywords: high quality; large domain sizes; monolayer molybdenum disulfide; oriented; wafer-scale.