Thin-film resonators and scanning probe microscopies (SPM) are usually used on low-frequency mechanical systems at the nanoscale or larger. Generally, off-chip approaches are applied to detect mechanical vibrations in these systems, but these methods are not much appropriate for atomic-thin-layer devices with ultrahigh characteristic frequencies and ultrathin thickness. Primarily, those mechanical devices based on atomic-layers provide highly improved properties, which are inapproachable with conventional nanoelectromechanical systems (NEMS). In this report, the assembly and manipulation of single-atomic-layer piezo-resonators as mass sensors with eigen mechanical resonances up to gigahertz are described. The resonators utilize electronic vibration transducers based on piezo-electric polarization charges, allowing direct and optimal atomic-layer sensor exports. This direct detection affords practical applications with the previously inapproachable Q-factor and sensitivity rather than photoelectric conversion. Exploration of a 2406.26 MHz membrane vibration is indicated with a thermo-noise-limited mass resolution of ∼3.0 zg (10-21 g) in room temperature. The fabricated mass sensors are contactless and fast and can afford a method for precision measurements of the ultrasmall mass with two-dimentional materials.
Keywords: MoS2; mass sensor; piezo-electric; resonator; small mass.