Piezoelectric micro-pumps offer many applications and could provide considerable flow rates in miniature systems. This study parametrically investigates the effects of major parameters, namely the length, width and attack angle of valves, piezoelectric length, and applied voltage. The results show that these parameters significantly affect the performance of the designed micro-pump. Even though increasing the piezoelectric length and operating voltage raise the flow rate, the modification of valve dimensions is more efficient since these parameters do not rely on any external power. According to the obtained results, as the length of the working valves increases, the provided flow rate becomes larger. There is an optimum condition for the width and attack angle of the valves. This optimum width is not dependent on the flow rate. With the use of the attack angle and the length of the valves as design parameters, the studied design shows promising results.
Keywords: micro-electro-mechanical systems (MEMS); numerical modeling; passive-valve; piezoelectric micro-pump.