Optical emission spectroscopy of lead sulfide films plasma deposition

Leonid Mochalov; Dominik Dorosz; Marcin Kochanowicz; Alexander Logunov; Aleksey Letnianchik; Nikolay Starostin; Sergey Zelentsov; Glenn Boreman; Vladimir Vorotyntsev

doi:10.1016/j.saa.2020.118629

Optical emission spectroscopy of lead sulfide films plasma deposition

Spectrochim Acta A Mol Biomol Spectrosc. 2020 Nov 5:241:118629. doi: 10.1016/j.saa.2020.118629. Epub 2020 Jun 20.

Authors

Leonid Mochalov¹, Dominik Dorosz², Marcin Kochanowicz³, Alexander Logunov⁴, Aleksey Letnianchik⁵, Nikolay Starostin⁵, Sergey Zelentsov⁵, Glenn Boreman⁶, Vladimir Vorotyntsev⁴

Affiliations

¹ Nizhny Novgorod State Technical University n.a. R.E. Alekseev, Nizhny Novgorod, Russia; University of North Carolina at Charlotte, NC, United States. Electronic address: mochalovleo@gmail.com.
² AGH University of Science and Technology in Kraków, Kraków, Poland.
³ Bialystok University of Technology, Bialystok, Poland.
⁴ Nizhny Novgorod State Technical University n.a. R.E. Alekseev, Nizhny Novgorod, Russia.
⁵ Lobachevsky University, Nizhny Novgorod, Russia.
⁶ University of North Carolina at Charlotte, NC, United States.

PMID: 32615373
DOI: 10.1016/j.saa.2020.118629

Abstract

In-situ Optical Emission Spectroscopy (OES) combined with quantum chemical calculations was used as a powerful tool to find out the exited reactive species existing in plasma discharge during the process of lead sulfide chalcogenide materials deposition. Low temperature nonequilibrium RF (40.68 MHz) plasma at low pressure (0.1 Torr) was employed for initiation of chemical interaction between precursors in the gas phase. Only high-pure elements were utilized as the initial substances. The ration between starting materials in the gas phase and power included into the plasma discharge were the variables. The mechanism of the plasma-chemical reaction was assumed and discussed. The stoichiometry and morphology of the surface of the as-deposited materials were studied by different analytical techniques.

Keywords: Lead sulfide; Optical emission spectroscopy; PECVD.