Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl4) Precursor

Woo-Jae Lee; Eun-Young Yun; Han-Bo-Ram Lee; Suck Won Hong; Se-Hun Kwon

doi:10.1016/j.dib.2020.105777

Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl₄) Precursor

Data Brief. 2020 May 28:31:105777. doi: 10.1016/j.dib.2020.105777. eCollection 2020 Aug.

Authors

Woo-Jae Lee¹, Eun-Young Yun¹, Han-Bo-Ram Lee², Suck Won Hong³, Se-Hun Kwon¹

Affiliations

¹ School of Materials Science and Engineering, Pusan National University, 30 Jangjeon-Dong Geumjeong-Gu, Busan, 609-735, Republic of Korea.
² Department of Materials Science and Engineering, Incheon National University, 119 Academy-ro, Yeonsu-gu, Incheon, 22012, Republic of Korea.
³ Department of Cogno-Mechatronics Engineering, Department of Optics and Mechatronics Engineering, Pusan National University, 30 Jangjeon-Dong Geumjeong-Gu, Busan, 609-735, Republic of Korea.

Abstract

A dataset in this report is regarding an article "Ultrathin Effective TiN Protective Films Prepared by Plasma-Enhanced Atomic Layer Deposition for High Performance Metallic Bipolar Plates of Polymer Electrolyte Membrane Fuel Cells" [1]. TiN (Titanium Nitride) thin films were deposited by Plasma-Enhanced Atomic Layer Deposition (PEALD) method using well known two types of precursor: using tetrakis(dimethylamino)titanium (TDMAT) and titanium tetrachloride (TiCl₄), and plasma. Summarized reports, growth characteristics (growth rate as a function of each precursor pulse time, plasma power, precursor and plasma purge time, thickness depending on the number of PEALD cycles), each precursor structural information and the atomic force micrographs (AFM) data are herein demonstrated. For TDMAT-TiN, N₂ plasma was used as a reactant whereas, H₂+N₂ plasma was used as TiCl₄-TiN reactant. To apply the bipolar plate substrate, two types of TiN thin films were introduced into Stainless steel (SUS) 316L.

Keywords: Plasma-Enhanced Atomic Layer Deposition (PEALD); TiN (Titanium Nitride); tetrakis(dimethylamino)titanium (TDMAT); titanium tetrachloride (TiCl4).