In this paper, a compact, integrated, semiconductor-clad strip waveguide label-free biosensor is proposed and analyzed. The device is based on CMOS-compatible materials such as amorphous-Si and silicon oxynitride. The optical sensor performance has been modeled by a three-dimensional beam propagation method. The simulations indicate that a 20-μm-long device can exhibit a surface limit of detection of 3 ng/cm2 for avidin molecules in aqueous solution. The sensor performance compares well to those displayed by other photonic biosensors with much larger footprints. The fabrication tolerances have been also studied in order to analyze the feasibility of the practical implementation of the biosensor.
Keywords: integrated optics; optical biosensor; photonic modeling; waveguide.