Optical sensors based on guided mode resonance (GMR) realized in polymers are promising candidates for sensitive and cost effective strain sensors. The benefit of GMR grating sensors is the non-contact, easy optical read-out with large working distance, avoiding costly alignment and packaging procedures. The GMR gratings with resonance around 850-900 nm are fabricated using electron beam lithography and replicated using a soft stamp based imprinting technique on 175 μ m-thick foils to make them suitable for optical strain sensing. For the strain measurements, foils are realized with both GMR gratings and waveguides with Bragg gratings. The latter are used as reference sensors and allow extracting the absolute strain sensitivity of the GMR sensor foils. Following this method, it is shown that GMR gratings have an absolute strain sensitivity of 1.02 ± 0.05 p m / μ ϵ at 870 nm.
Keywords: Ormocer®; electron beam lithography; epoxy; flexible strain sensor; guided mode resonance grating sensor; polymer foil; temperature sensor; ultraviolet nanoimprint lithography; waveguide Bragg grating sensor.