Magnetostrictive Performance of Electrodeposited TbxDy(1-x)Fey Thin Film with Microcantilever Structures

Hang Shim; Kei Sakamoto; Naoki Inomata; Masaya Toda; Nguyen Van Toan; Takahito Ono

doi:10.3390/mi11050523

Magnetostrictive Performance of Electrodeposited Tb_xDy_(1-x)Fe_y Thin Film with Microcantilever Structures

Micromachines (Basel). 2020 May 21;11(5):523. doi: 10.3390/mi11050523.

Authors

Hang Shim¹, Kei Sakamoto², Naoki Inomata¹, Masaya Toda¹, Nguyen Van Toan^{1

3}, Takahito Ono^{1

2

3}

Affiliations

¹ Department of Mechanical Systems Engineering, Tohoku University, Sendai 980-8579, Japan.
² Micro-Nanomachining Research Education Center, Tohoku University, Sendai 980-8579, Japan.
³ Micro System Integration Center (µSiC), Tohoku University, Sendai 980-8579, Japan.

Abstract

The microfabrication with a magnetostrictive Tb_xDy_(1-x)Fe_y thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of Tb_xDy_(1-x)Fe_y is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb_0.36Dy_0.64Fe_1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.

Keywords: TbxDy(1−x)Fey; Terfenol-D; electrodeposition; magnetostriction; thin film.