Herein, we report the catalyst assisted growth of TiO2 one-dimensional (1D) nanowires (NWs) on alumina substrates by the thermal oxidation technique. RF magnetron sputtering was used to deposit a thin Ti metallic layer on the alumina substrate, followed by an Au catalytic layer on the Ti metallic one. Thermal oxidation was carried out in an oxygen deficient environment. The optimal thermal growth temperature was 700 °C, in a mixture environment composed by Ar and O2. As a comparison, Ti films were also oxidized without the presence of the Au catalyst. However, without the Au catalyst, no growth of nanowires was observed. Furthermore, the effect of the oxidation temperature and the film thickness were also investigated. SEM, TEM, and EDX studies demonstrated the presence of Au nanoparticles on top of the NWs, indicating that the Au catalyst drove the growth process. Raman spectroscopy revealed the Rutile crystalline phase of TiO2 NWs. Gas testing measurements were carried out in the presence of a relative humidity of 40%, showing a reversible response to ethanol and H2 at various concentrations. Thanks to the moderate temperature and the easiness of the process, the presented synthesis technique is suitable to grow TiO2 NWs for many different applications.
Keywords: TiO2 gas sensor; TiO2 nanowires; metal oxide nanowires; seed-assisted thermal oxidation; thermal oxidation.