Photolithographically Constructed Single ZnO Nanowire Device and Its Ultraviolet Photoresponse

Quanli Liu; Takao Yasui; Kazuki Nagashima; Takeshi Yanagida; Masafumi Horiuchi; Zetao Zhu; Hiromi Takahashi; Taisuke Shimada; Akihide Arima; Yoshinobu Baba

doi:10.2116/analsci.20N002

Photolithographically Constructed Single ZnO Nanowire Device and Its Ultraviolet Photoresponse

Anal Sci. 2020 Sep 10;36(9):1125-1129. doi: 10.2116/analsci.20N002. Epub 2020 Apr 17.

Authors

Quanli Liu¹, Takao Yasui^{2

3

4}, Kazuki Nagashima^{5

6}, Takeshi Yanagida^{6

7

8}, Masafumi Horiuchi⁹, Zetao Zhu⁹, Hiromi Takahashi⁹, Taisuke Shimada⁹, Akihide Arima⁹, Yoshinobu Baba^{10

11

12}

Affiliations

¹ Department of Biomolecular Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya, 464-8603, Japan. liu.quanli@g.mbox.nagoya-u.ac.jp.
² Department of Biomolecular Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya, 464-8603, Japan. yasui@chembio.nagoya-u.ac.jp.
³ Japan Science and Technology Agency (JST), PRESTO, 4-1-8 Honcho, Kawaguchi, Saitama, 332-0012, Japan. yasui@chembio.nagoya-u.ac.jp.
⁴ Institute of Nano-Life-Systems, Institutes of Innovation for Future Society, Nagoya University, Furo-cho, Chikusa, Nagoya, 464-8603, Japan. yasui@chembio.nagoya-u.ac.jp.
⁵ Japan Science and Technology Agency (JST), PRESTO, 4-1-8 Honcho, Kawaguchi, Saitama, 332-0012, Japan.
⁶ Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo, 113-8656, Japan.
⁷ Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka-cho, Ibaraki, Osaka, 567-0047, Japan.
⁸ Institute of Materials Chemistry and Engineering, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka, 816-8580, Japan.
⁹ Department of Biomolecular Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya, 464-8603, Japan.
¹⁰ Department of Biomolecular Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya, 464-8603, Japan. babaymtt@chembio.nagoya-u.ac.jp.
¹¹ Institute of Nano-Life-Systems, Institutes of Innovation for Future Society, Nagoya University, Furo-cho, Chikusa, Nagoya, 464-8603, Japan. babaymtt@chembio.nagoya-u.ac.jp.
¹² Institute of Quantum Life Science, National Institutes for Quantum and Radiological Science and Technology, 4-9-1 Anagawa, Inage, Chiba, 263-8555, Japan. babaymtt@chembio.nagoya-u.ac.jp.

PMID: 32307346
DOI: 10.2116/analsci.20N002

Abstract

A sparse ZnO nanowire array with aspect ratio of ca. 120 and growth rate of 1 μm/h was synthesized by controlling the density of seeds at the initial stage of nanowire growth. The spatially-separated nanowires were cut off from the growth substrate without breaking, and thus were useful in the construction of a single-nanowire device by photolithography. The device exhibited a linear current-voltage characteristic associated with ohmic contact between ZnO nanowire and electrodes. The device further demonstrated a reliable photoresponse with an I_UV/I_dark of ∼100 to ultraviolet light irradiation.

Keywords: ZnO nanowire; photolithography; single nanowire device; ultraviolet photodetector.