Flexible touch sensor fabricated by double-sided nanoimprint lithography metal transfer

Nanotechnology. 2020 Jul 31;31(31):315302. doi: 10.1088/1361-6528/ab8a90. Epub 2020 Apr 17.

Abstract

A double-sided nanoimprint lithography metal transfer method has been developed to fabricate a flexible capacitive touch sensor. The electrodes of this sensor are aligned and overlapped to each other and consist of a diamond aluminum mesh, which achieved a transmittance of 94% and anisotropic surface resistivity. The maximum capacitance change of the touch sensor unit is up to 41.8% when fullly touched. A 3 × 3 sensor array was tested to prove good touch detection function and the potential for large-scale applications.