We report a reliable and robust method for the fabrication of bioinspired superomniphobic surfaces with precise concave-cap-shaped micropillar arrays. This method includes silicon-based conventional microelectromechanical systems (MEMS) and polymer replication processes. We have elucidated two critical cases of fabrication rules for precise micromachining of a negative-shaped bioinspired silicon master. The fabricated polymeric structure replicated from the semipermanent silicon master based on the design rules exhibited high structural fidelity and robustness. Finally, we validated the superomniphobic properties, structural durability, and long-term stability of the fabricated bioinspired surfaces.
Keywords: biomimetics; concave-cap-shaped micropillar; micromachining; springtail; superomniphobic.