Nanoindentation technique at low temperatures have developed from initial micro-hardness driving method at a single temperature to modern depth-sensing indentation (DSI) method with variable temperatures over the last three decades. The technique and implementation of representative cooling systems adopted on the indentation apparatuses are discussed in detail here, with particular emphasis on pros and cons of combination with indentation technique. To obtain accurate nanoindentation curves and calculated results of material properties, several influence factors have been carefully considered and eliminated, including thermal drift and temperature induced influence on indenter and specimen. Finally, we further show some applications on typical materials and discuss the perspectives related to low temperature nanoindentation technique.
Keywords: apparatus; hardness test; low temperature; mechanical properties; nanoindentation.