Recently, graphene has been explored in several research areas according to its outstanding combination of mechanical and electrical features. The ability to fabricate micro-patterns of graphene facilitates its integration in emerging technologies such as flexible electronics. This work reports a novel micro-pattern approach of graphene oxide (GO) film on a polymer substrate using metal bonding. It is shown that adding ethanol to the GO aqueous dispersion enhances substantially the uniformity of GO thin film deposition, which is a great asset for mass production. On the other hand, the presence of ethanol in the GO solution hinders the fabrication of patterned GO films using the standard lift-off process. To overcome this, the fabrication process provided in this work takes advantage of the chemical adhesion between the GO or reduced GO (rGO) and metal films. It is proved that the adhesion between the metal layer and GO or rGO is stronger than the adhesion between the latter and the polymer substrate (i.e., cyclic olefin copolymer used in this work). This causes the removal of the GO layer underneath the metal film during the lift-off process, leaving behind the desired GO or rGO micro-patterns. The feasibility and suitability of the proposed pattern technique is confirmed by fabricating the patterned electrodes inside a microfluidic device to manipulate living cells using dielectrophoresis. This work adds great value to micro-pattern GO and rGO thin films and has immense potential to achieve high yield production in emerging applications.
Keywords: adhesion; copper; dielectrophoresis; graphene oxide; lithography; metal; pattern; reduced graphene oxide.