Nanowires of ferroelectric potassium niobate were grown by filling nanoporous templates of both side opened anodic aluminum oxide (AAO) through radiofrequency vacuum sputtering for multisensor fabrication. The precise geometrical ordering of the AAO matrix led to well defined single axis oriented wire-shaped material inside the pores. The sensing abilities of the samples were studied and analyzed in terms of piezoelectric and pyroelectric response and the results were compared for different length of the nanopores (nanotubes)-1.3 µm, 6.3 µm and 10 µm. Based on scanning electronic microscopy, elemental and microstructural analyses, as well as electrical measurements at bending and heating, the overall sensing performance of the devices was estimated. It was found that the produced membrane type elements, consisting potassium niobate grown in AAO template exhibited excellent piezoelectric response due to the increased specific area as compared to non-structured films, and could be further enhanced with the nanowires length. The piezoelectric voltage increased linearly with 16 mV per micrometer of nanowire's length. At the same time the pyroelectric voltage was found to be less sensitive to the nanowires length, changing its value at 400 nV/µm. This paper provides a simple and low-cost approach for nanostructuring ferroelectric oxides with multisensing application, and serves as a base for further optimization of template based nanostructured devices.
Keywords: anodic aluminum oxide; ferroelectric oxide; multisensor device; nanostructuring; nanowires; piezoelectric response; pyroelectric response.