In this work, the synthesis and characterization of hydrogenated diamond-like carbon (HDLC) nanocomposite thin films with embedded metallic Ag and Cu nanoparticles (NPs) are studied. These nanocomposite films were deposited using a hybrid technique with independent control over the carbon and metal sources. The metallic nanoparticles were directly deposited from the gas phase, avoiding surface diffusion of metal species on the deposition surface. The structural features, surface topography and optical properties of pure and nanocomposite HDLC films are studied and the effect of metal introduction into the carbon matrix is discussed. The interactions between the carbon ion beam and the NPs are considered and it is demonstrated that the nanocomposite HDLC:metal films, especially for Cu NPs, can retain the transparency level of the pure HDLC, by limiting the interactions between metal and carbon during deposition.
Keywords: cluster beam source; copper nanoparticles; hydrogenated diamond like carbon; nanocomposite thin films; silver nanoparticles.