Resonant-type piezoelectric linear motor driven by harmonic synthesized mechanical square wave

Liangguo He; Sai Hao; Xiaoyong Zhao; Yuge Dong; Xinyu Li; Jian Chen; Yong Wang

doi:10.1063/1.5110774

Resonant-type piezoelectric linear motor driven by harmonic synthesized mechanical square wave

Rev Sci Instrum. 2020 Mar 1;91(3):035005. doi: 10.1063/1.5110774.

Authors

Liangguo He¹, Sai Hao¹, Xiaoyong Zhao¹, Yuge Dong¹, Xinyu Li¹, Jian Chen¹, Yong Wang¹

Affiliation

¹ School of Mechanical Engineering, Hefei University of Technology, Hefei, Anhui 230009, China.

PMID: 32259962
DOI: 10.1063/1.5110774

Abstract

In this study, a novel resonant piezoelectric linear motor driven by harmonic synthesized mechanical square waves was designed, fabricated, and tested. The motor consists of a stator, a mover, and auxiliary parts. Periodic square wave motions of the stator and the mover were generated by composing two sinusoidal resonant bending vibrations with a frequency ratio of 1:3. Piezoelectric plates were deformed with a certain regularity to drive the piezoelectric motor. The finite element method software COMSOL was used to design the structure of the motor. An experimental device was established to validate the working principle and evaluate the performance of the motor. The prototype motor reached the maximum no-load velocity of 22.5 mm/s with the stator driven voltage of 140 V_p-p and the mover driven voltage of 180 V_p-p for a base frequency. The maximum traction force of 3.8 N was obtained under a stator driving voltage of 140 V_p-p and a mover driving voltage of 100 V_p-p for the base frequency. The motor achieved a net efficiency of 12.2% with a load of 0.3 N.