Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation

Opt Express. 2020 Mar 16;28(6):8512-8527. doi: 10.1364/OE.380690.

Abstract

Laser scanning based on Micro-Electro-Mechanical Systems (MEMS) scanners has become very attractive for biomedical endoscopic imaging, such as confocal microscopy or Optical Coherence Tomography (OCT). These scanners are required to be fast to achieve real-time image reconstruction while working at low actuation voltage to comply with medical standards. In this context, we report a 2-axis Micro-Electro-Mechanical Systems (MEMS) electrothermal micro-scannercapable of imaging large fields of view at high frame rates, e.g. from 10 to 80 frames per second. For this purpose, Lissajous scan parameters are chosen to provide the optimal image quality within the scanner capabilities and the sampling rate limit, resulting from the limited A-scan rate of typical swept-sources used for OCT. Images of 233 px × 203 px and 53 px × 53 px at 10 fps and 61 fps, respectively, are experimentally obtained and demonstrate the potential of this micro-scannerfor high definition and high frame rate endoscopic Lissajous imaging.

MeSH terms

  • Computer Systems
  • Endoscopes
  • Endoscopy / methods
  • Equipment Design
  • Humans
  • Image Processing, Computer-Assisted
  • Micro-Electrical-Mechanical Systems / instrumentation
  • Micro-Electrical-Mechanical Systems / methods*
  • Micro-Electrical-Mechanical Systems / statistics & numerical data
  • Microscopy, Confocal / instrumentation
  • Microscopy, Confocal / methods
  • Microscopy, Confocal / statistics & numerical data
  • Optical Devices
  • Optical Imaging / instrumentation
  • Optical Imaging / methods*
  • Optical Imaging / statistics & numerical data
  • Optical Phenomena
  • Tomography, Optical Coherence / instrumentation
  • Tomography, Optical Coherence / methods
  • Tomography, Optical Coherence / statistics & numerical data