An ionization sensor based on suspended carbon nanotubes (CNTs) was presented. A suspended CNT beam was fabricated by a low-temperature surface micromachining process using SU8 photoresist as the sacrificial layer. Application of a bias to the CNT beam generated very high non-linear electric fields near the tips of individual CNTs sufficient to ionize target gas molecules and initiate a breakdown current. The sensing mechanism of the CNT ionization sensor was discussed. The sensor response was tested in air, nitrogen, argon, and helium ambients. Each gas demonstrated a unique breakdown signature. Further, the sensor was tested with gaseous mixtures. The sensor exhibited good long-term stability and had comparable performance to other reported CNT-based ionization sensors in literature, which use high-temperature vapor deposition methods to grow CNTs. The sensor notably allowed for lower ionization voltages due to its reduced ionization gap size.
Keywords: carbon nanotubes; ionization; suspended.