One-dimensional (1D) nanostructures are extensively used in the design of novel electronic devices, sensors, and energy devices. One of the major challenges faced by the electronics industry is the problem of contact between the 1D nanostructure and electrode, which can limit or even jeopardize device operations. Herein, a universal method that can realize good Ohmic and mechanical contact between an individual 1D nanostructure and a tungsten needle at sub-micron or micron scale is investigated and presented in a scanning electron microscope (SEM) chamber with the synergy of an electron beam and electrical current flowing through the welded joint. The linear I‒V curves of five types of individual 1D nanostructures, characterized by in-situ electrical measurements, demonstrate that most of them demonstrate good Ohmic contact with the tungsten needle, and the results of in-situ tensile measurements demonstrate that the welded joints possess excellent mechanical performance. By simulation analysis using the finite element method, it is proved that the local heating effect, which is mainly produced by the electrical current flowing through the welded joints during the welding process, is the key factor in achieving good Ohmic contact.
Keywords: electron-beam-induced deposition (EBID); in-situ measurement; local current heating; nanostructure welding technology; one-dimensional nanostructures.