Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

Wen Huang; Zhendong Yang; Mark D Kraman; Qingyi Wang; Zihao Ou; Miguel Muñoz Rojo; Ananth Saran Yalamarthy; Victoria Chen; Feifei Lian; Jimmy H Ni; Siyu Liu; Haotian Yu; Lei Sang; Julian Michaels; Dane J Sievers; J Gary Eden; Paul V Braun; Qian Chen; Songbin Gong; Debbie G Senesky; Eric Pop; Xiuling Li

doi:10.1126/sciadv.aay4508

Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

Sci Adv. 2020 Jan 17;6(3):eaay4508. doi: 10.1126/sciadv.aay4508. eCollection 2020 Jan.

Authors

Wen Huang^{1

2}, Zhendong Yang¹, Mark D Kraman¹, Qingyi Wang¹, Zihao Ou³, Miguel Muñoz Rojo^{4

5}, Ananth Saran Yalamarthy⁶, Victoria Chen⁴, Feifei Lian⁴, Jimmy H Ni¹, Siyu Liu¹, Haotian Yu², Lei Sang², Julian Michaels¹, Dane J Sievers¹, J Gary Eden¹, Paul V Braun³, Qian Chen³, Songbin Gong¹, Debbie G Senesky⁷, Eric Pop⁴, Xiuling Li¹

Affiliations

¹ Department of Electrical and Computer Engineering and Micro and Nanotechnology Laboratory, University of Illinois, Urbana, IL 61801, USA.
² School of Microelectronics, Soft Membrane Electronic Technology Laboratory, Hefei University of Technology, Hefei, Anhui 230601, China.
³ Department of Materials Science and Engineering, University of Illinois, Urbana, IL 61801, USA.
⁴ Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA.
⁵ Department of Thermal and Fluid Engineering, University of Twente, Enschede, 7500 AE, Netherlands.
⁶ Department of Mechanical Engineering, Stanford University, Stanford, CA 94305, USA.
⁷ Department of Aeronautics and Astronautics, Stanford University, Stanford, CA 94305, USA.

Abstract

Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 μH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 μH/mm² and 23 μH/mm³, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.

Copyright © 2020 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC).

Publication types

Research Support, Non-U.S. Gov't