A layered Ge2Sb2Te5 phase change material

Nanoscale. 2020 Feb 7;12(5):3351-3358. doi: 10.1039/c9nr08745a. Epub 2020 Jan 27.

Abstract

In this study, a universal Ge2Sb2Te5 phase change material was sputtered to obtain a layered structure. The crystalline phase of this material was prepared by annealing. SEM (scanning electron microscopy) and HRTEM (high-resolution transmission electron microscopy) images give confirmed that the sputtered Ge2Sb2Te5 thin film in crystalline phase has multiple layers. The layers can be exfoliated by acetone. The thicknesses of acetone-exfoliated crystalline and amorphous flakes are approx. 10-60 nm.