A Weak Form Nonlinear Model for Thermal Sensitivity of Love Wave Mode on Layered Structures

IEEE Trans Ultrason Ferroelectr Freq Control. 2020 Jun;67(6):1275-1283. doi: 10.1109/TUFFC.2020.2968007. Epub 2020 Jan 20.

Abstract

A precise theoretical model for the thermal sensitivity of Love wave mode is significant in the structure design, temperature compensation, and the prediction of thermal behavior. This article proposes a weak form nonlinear model to calculate the thermal sensitivity of Love waves on arbitrary layered structures. The third-order material constants, as well as the thermal stress and strain tensors between the substrate, electrodes, and wave-guiding layer, are considered in the model. The 9 ×9 effective elastic and the 3 ×9 effective piezoelectric matrixes are imported into the nonlinear constitutive equations and boundary conditions using weak form expressions. A temperature-compensated Love wave mode resonator on a layered ZnO/interdigital transducer (IDT)/quartz structure is obtained. The theoretical model is verified through the comparison of experimental and analytical results. The model is beneficial for the design of Love wave devices and sensors.