As the consumer market in the mold, automation and aerospace industries grows, the demand for laser machining using on electron beam drilling. To enhance the machinability and productivity of the e-beam (electron beam), we want to develop a vaporized amplification sheet. The e-beam was used to mainly utilize for polishing, finishing, welding, a lithography process etc. However, the electron beam drilling machine does not develop in the country because it is difficult to make high power density and vaporized amplification sheets. The vaporized amplification sheets with fine particles are one of the essential factors and decided the quality of machined micro holes according to the macromolecule. So, this paper considers the preparation process of vaporized amplification sheets and the analysis of macromolecule for improving the electron beam processability and machinability efficiency. Also, we analyzed process conditions for the optimization of the electron beam machining process.