In this paper, we proposed Omega-Shaped-Gate Nanowire Field Effect Transistor (ONWFET) with different gate coverage ratio (GCR). In order to investigate electrical and self-heating characteristics of the proposed devices, on-current, off-current, subthreshold swing (SS), and operating temperature were examined by using 3D TCAD simulator and compared with nanowire MOSFET (NW-MOSFET). As a result, a possibility of reducing off-current and operating temperature was demonstrated by using the ONWFET with 40% GCR. Therefore, the ONWFET can save power consumption and serve as low power application such as battery-powered portable electronic devices.