Enhancing the response to visible light and inhibiting recombination of photogenerated electrons and holes is a key point for strongly improved self-cleaning performances of TiO₂ self-cleaning films. In this work, TiO₂ thin film doping with three different ions (Fe3+, Al3+, Ce3+) on glass substrate respectively by sol-gel method to explore the effect of ions on self-cleaning performance of TiO₂ thin films. All the prepared samples are characterized by XRD, SEM, UV-Vis and water contact angle tester. Moreover, the self-cleaning mechanism of doping TiO₂ thin film is discussed. The water contact angle of TiO₂ thin film doping with 9% Fe (molar ratio), 5% Ce and 5% Al are reach at 0°, respectively. In comparison with the water contact angle of pure TiO₂ thin film (2.5°), TiO₂ thin film doping with metal ions exhibit better self-cleaning property.