Photolithography Fabricated Spacer Arrays Offering Mechanical Strengthening and Oil Motion Control in Electrowetting Displays

Sensors (Basel). 2020 Jan 15;20(2):494. doi: 10.3390/s20020494.

Abstract

Introducing spacers into pixelated electrowetting displays (EWDs) normally gives mechanical strengthening, while bringing undesired disturbance of water/oil interfacial dynamics. Hence, spacer array is a key pixel structure needs careful consideration in the design and fabrication of electrowetting displays. Here, we propose a spacer array, which is designed standing on the junction of adjacent pixel walls, fabricated by photolithography. The spacer array provides mechanical strength enhancement and reliable oil motion controllability. By optimizing the spacer distribution density, the EWD device may achieve 28% increase in open ratio (white area fraction) and withstand 60 N/mm2 pressure. This design of spacer array reasonably solves the contradiction between mechanical strength enhancement and optoelectronic performance in EWDs, providing potential applications in oil-water two-phase microfluidic devices.

Keywords: electrowetting display; mechanical strength; oil motion; optoelectronic performance; spacer arrays.