We present a multi-region extension of power law background subtraction for core-level EEL spectra to improve the robustness of background removal. This method takes advantage of the post-edge shape of core-loss EEL edges to enable simultaneous fitting of pre- and post-edge background regions. This method also produces simultaneous and consistent background removal from multiple edges in a single EEL spectrum. The stability of this method with respect to the fitting energy window and the EELS signal to noise ratio is also discussed.
Keywords: Background; Core-Level; EELS; Fitting; STEM.
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