Apparatus for electrically detected electron nuclear double resonance in solid state electronic devices

Rev Sci Instrum. 2019 Dec 1;90(12):123111. doi: 10.1063/1.5123619.

Abstract

We have developed a sensitive electron nuclear double resonance spectrometer in which the detection takes place through electrically detected magnetic resonance. We demonstrate that the spectrometer can provide reasonably high signal to noise spectra of 14N interactions with deep level centers in a fully processed bipolar junction transistor at room temperature.