Fake tilts in differential wavefront sensing

Opt Express. 2019 Nov 25;27(24):34505-34518. doi: 10.1364/OE.27.034505.

Abstract

Two-beam interferometry is a tool of high-precision length-metrology, where displacements are measured to within sub-nanometer resolution and accuracy. Differential wavefront sensing - via phase detection by segmented photodiodes - adds the capability of simultaneously measuring the target translation and rotation. This paper gives an analytical model explaining the observation of fake tilts by a combined x-ray and optical interferometer.