Suspended tungsten trioxide (WO3) gate AlGaN/GaN heterostructure deep ultraviolet detectors with integrated micro-heater

Jianwen Sun; Teng Zhan; Zewen Liu; Junxi Wang; Xiaoyan Yi; Pasqualina M Sarro; Guoqi Zhang

doi:10.1364/OE.27.036405

Suspended tungsten trioxide (WO₃) gate AlGaN/GaN heterostructure deep ultraviolet detectors with integrated micro-heater

Opt Express. 2019 Dec 9;27(25):36405-36413. doi: 10.1364/OE.27.036405.

Authors

Jianwen Sun, Teng Zhan, Zewen Liu, Junxi Wang, Xiaoyan Yi, Pasqualina M Sarro, Guoqi Zhang

PMID: 31873420
DOI: 10.1364/OE.27.036405

Abstract

A suspended WO₃-gate AlGaN/GaN heterostructure photodetector integrated with a micro-heater is micro-fabricated and characterized for ultraviolet photo detection. The transient optical characteristics of the photodetector at different temperatures are studied. The 2DEG-based photodetector shows a recovery (170 s) time under 240 nm illumination at 150 ℃. The measured spectral response of WO₃-gate AlGaN/GaN heterostructure shows a high response in deep ultraviolet range. Responsivity at 240 nm wavelength is 4600 A/W at 0.5 V bias. These characteristics support the feasibility of a high accuracy deep UV detector based on the suspended AlGaN/GaN heterostructure integrated with a micro-heater.