A U-shaped microwave resonator for flexible mechanical sensors application

Jun Tang; Qiang Zhu; Changlong Li; Yulei Chen; Zhenrong Zhang; Hao Guo; Fushun Nian; Wenyao Liu; Anjiang Cai; Baoguo Yang; Jun Liu

doi:10.1063/1.5096420

A U-shaped microwave resonator for flexible mechanical sensors application

Rev Sci Instrum. 2019 Nov 1;90(11):114712. doi: 10.1063/1.5096420.

Authors

Jun Tang¹, Qiang Zhu¹, Changlong Li², Yulei Chen¹, Zhenrong Zhang¹, Hao Guo¹, Fushun Nian³, Wenyao Liu¹, Anjiang Cai⁴, Baoguo Yang³, Jun Liu¹

Affiliations

¹ Key Laboratory of Instrumentation Science and Dynamic Measurement, School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
² Beijing Institute of Astronautical Systems Engineering, Beijing 100076, China.
³ Science and Technology on Electronic Test and Measurement Laboratory, The 41st Research Institute of CETC, Qingdao 266555, China.
⁴ School of Mechanical and Electrical Engineering, Xi'an University of Architecture and Technology, Xi'an 710055, China.

PMID: 31779373
DOI: 10.1063/1.5096420

Abstract

A flexible mechanical deformation test system, which is a combination of the microwave and the flexible film, is proposed. The system consists of a U-shaped microwave resonator, coaxial transmission line, and PDMS flexible substrate. Microwave signals are generated from the vector network analyzer and loaded to the coaxial transmission line and then coupled to the U-shaped resonator through the coupling loop. The resonator works at the gigahertz band with the test range from 3 GHz to 40 GHz. The resonant frequency of the resonator can be adjusted by changing the shape of PDMS, and the related signals can be detected by using the S₁₁ parameter of the microwave. The response time of the U-shaped resonator is less than 20 ms, and the sensitivity on the curved surface is 12.5 Hz/nm.