Additive manufacturing has dramatically transformed the design and fabrication of advanced objects. Printed electronics-an additive thin-film processing technology-aims to realize low-cost, large-area electronics, and fabrication of devices with highly customized architectures. Recent advances in printing technology have led to several innovative applications; however, layer-on-layer deposition persists as a challenging issue. Here, the additive manufacturing of functional oxide devices by inkjet printing is presented. Two conditions appear critical for successful layer-on-layer printing: (i) preservation of stable surface properties and (ii) suppression of the material accumulation at the edges of a feature upon drying. The former condition was satisfied by introducing a surface modification layer of a polymer with nanotextured topography, and the latter was satisfied by designing the solvent composition of the ink. The developed process is highly efficient and enables conformal stacking of functional oxide layers according to the user-defined geometry, sequence arrangement, and layer thickness. To prove the effectiveness of this concept, we demonstrate an additive manufacture of all-oxide ferroelectric multilayer capacitors/transducers. Printed multilayer devices offer a significant increase in the capacitance density and the electromechanical voltage response in comparison to the single-layer devices. Further growth in the number of available functional oxide inks will enable arbitrary device architectures with novel functionalities.
Keywords: MEMS; ferroelectric films; inkjet printing; multilayer capacitors; printed electronics.