Fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator using femtosecond laser-assisted chemomechanical polish

Opt Lett. 2019 Oct 1;44(19):4698-4701. doi: 10.1364/OL.44.004698.

Abstract

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator, which is achieved by femtosecond laser-assisted chemomechanical polish. We demonstrate a high-extinction-ratio beam splitter, a 1×6 optical switch, and a balanced 3×3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.