Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

Jianhao Zhang; Zhiwei Fang; Jintian Lin; Junxia Zhou; Min Wang; Rongbo Wu; Renhong Gao; Ya Cheng

doi:10.3390/nano9091218

Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

Nanomaterials (Basel). 2019 Aug 29;9(9):1218. doi: 10.3390/nano9091218.

Authors

Jianhao Zhang^{1

2}, Zhiwei Fang^{3

4}, Jintian Lin¹, Junxia Zhou^{3

4}, Min Wang^{3

4}, Rongbo Wu^{1

2}, Renhong Gao^{1

2}, Ya Cheng^{5

6

7

8}

Affiliations

¹ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
² Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
³ State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
⁴ The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China.
⁵ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ya.cheng@siom.ac.cn.
⁶ State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China. ya.cheng@siom.ac.cn.
⁷ The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China. ya.cheng@siom.ac.cn.
⁸ Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China. ya.cheng@siom.ac.cn.

Abstract

We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 10⁷ can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

Keywords: chemo-mechanical polish; controllable wedge angle; high quality factors; lithium niobate microdisk resonator.

Grants and funding

11734009/National Natural Science Foundation of China