A beam profile monitor for picoampere low-energy ion beams

Rev Sci Instrum. 2019 Jul;90(7):076107. doi: 10.1063/1.5094090.

Abstract

A beam-profile monitor has been constructed based on a two-dimensional cross-connected-pixels anode and a 128-channel picoammeter system. It can provide the total beam current, as well as the current projections in the x- and y-directions with a spatial resolution of ∼1 mm. It is suitable for diagnosis of low-energy charged-particle beams ranging from subpicoamperes to nanoamperes, e.g., the ion beams extracted from an electron beam ion source.