Scratches in fused silica are notorious laser damage precursors to UV laser damage initiation. Ductile and brittle scratches were intentionally generated using various polishing slurries. The distribution, profile and the dimension of scratches were characterized. The damage resistance of polished surfaces was evaluated using raster scanning damage testing protocol. The results show that both ductile and brittle scratches greatly increase area proportion of laser damage about one to two orders of magnitude relative to unscratched surface and brittle scratches are more deleterious. Moreover, finite difference time domain (FDTD) simulation was used to numerically calculate the light field distribution around scratches on rear surface (i.e. exit surface for light) which indicates that modulated light intensity is susceptible to the profile and size of scratches. FDTD simulation results also indicate that the light field intensification is elevated with the dimension of scratches and light modulation effects in triangular scratches are usually not as notable as serrated and parabolic scratches.