Editorial for the Special Issue on Optical MEMS

Huikai Xie; Frederic Zamkotsian

doi:10.3390/mi10070458

Editorial for the Special Issue on Optical MEMS

Micromachines (Basel). 2019 Jul 7;10(7):458. doi: 10.3390/mi10070458.

Authors

Huikai Xie¹, Frederic Zamkotsian²

Affiliations

¹ Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA. hkxie@ece.ufl.edu.
² Aix Marseille Univ, CNRS, CNES, LAM, Laboratoire d'Astrophysique de Marseille, 38 rue Frederic Joliot Curie, 13388 Marseille CEDEX 13, France. frederic.zamkotsian@lam.fr.

Abstract

Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...].

Publication types

Editorial