Absolute quasi-static calibration method of piezoelectric high-pressure sensor based on force sensor

Rev Sci Instrum. 2019 May;90(5):055111. doi: 10.1063/1.5083895.

Abstract

In this paper, a strain-gauge-type force sensor which can be directly mounted on the existing drop-weight device and used to calibrate the piezoelectric high-pressure sensor is designed. The absolute quasistatic pressure calibration principle and the measurement principle of the strain-gauge-type force sensor are described. Based on the mathematical relation model between force and pressure, the influence factors of pressure calibration accuracy are discussed, and the empirical formula for correcting the peak pressure is obtained. To analyze the mechanical strength of the force sensor, the modal parameters of the force sensor in the impact direction, and the pressure loss in the transmission process, a finite element simulation based on ANSYS software is performed. In addition, the static characteristic of the force sensor and the dynamic characteristic of the new drop-weight system composed of the force sensor, the mounting frame, and weight stacks are analyzed. To verify the accuracy of the empirical formula, the absolute quasistatic pressure calibration experiment is performed based on the calibration device. The final experimental results show that the accuracy of pressure calibration can be effectively improved by means of empirical formula correction. Taking the peak pressure measured by the reference pressure sensors as the standard value, the maximum calculation difference can be reduced from 3.42% (obtained by the direct calculation method) to 0.70% by the empirical formula correction method.