Thermal characterization of thin films via dynamic infrared thermography

Rev Sci Instrum. 2019 Apr;90(4):044903. doi: 10.1063/1.5067400.

Abstract

We extend the infrared thermography of thin materials for measurements of the full time response to homogeneous heating via illumination. We demonstrate that the thermal conductivity, the heat capacity, as well as the thermal diffusivity can be determined comparing the experimental data to finite difference simulations using a variety of test materials such as thin doped and undoped silicon wafers, sheets of steel, as well as gold and polymer films. We show how radiative cooling during calibration and measurement can be accounted for and that the effective emissivity of the material investigated can also be measured by the setup developed.